APPARATUS FOR SUPPLYING DEPOSITION METERIAL AND FILM DEPOSITING SYSTEM HAVING THE SAME

摘要

A device for supplying a deposition material and a system for depositing a thin film including the same are provided to maintain the regular amount of the deposition material supplied through a plurality of powder storage holes by making the size of the powder storage hole to be corresponded to the amount of the deposition material as much as for one time deposition process. A device for supplying a deposition material comprises: a powder feeder including a plurality of rotating powder storage holes(1111a,1111e); a powder storage(1200) supplying the deposition material of the powdered form to one or more among a plurality of powder storage holes; and a carrier gas feeding part(1300) discharging the deposition material of the powder form stored in the powder storage holes. The powder storage comprises a first powder storage and a second powder storage.