WHEEL MODULATOR FOR PARTICLE BEAM CURING APPARATUS

摘要

A wheel modulator for particle beam curing apparatus is provided, which can be manufactured economically and easily controls the various ranges. A wheel modulator for particle beam curing apparatus comprises: a wheel(20) for the range conversion which is arranged on the travel route of the particle beam, is arranged at an interval in the peripheral direction of the virtual central axis line forwarding the travel route direction, and in which a plurality of wings having different thickness are equipped in the central axis line direction; a motor(30) which is connected to the wheel for the range conversion and runs the wheel for the range conversion; and a control device(40) controlling the speed of rotation of the motor.