<p>A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element.</p>
申请公布号
EP2074397(A2)
申请公布日期
2009.07.01
申请号
EP20070838658
申请日期
2007.09.21
申请人
CORNELL RESEARCH FOUNDATION, INC.
发明人
DESAI, SHAHYAAN;NETRAVALI, ANIL, N.;THOMPSON, MICHAEL, O.