| 摘要 |
A substrate transfer robot device is provided to simplify a transfer stage by reducing a time required for filling each cell box by using a buffer unit. A support member(110) supports a glass substrates(400). A maintaining unit(120) performing lift and rotation are maintained so that the support member horizontally moves. A buffer unit(130) loads a plurality of glass substrates and is coupled to the position where the support member passes through. The buffer unit is coupled while rotating and lifting with the maintaining unit or only rotating. The support member moves to the transferring position, the standby position, and the buffer position. The glass substrate is loaded or unloaded in the buffer unit in the buffer position.
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