| 摘要 |
A capacitor is provided to prevent dishing and micro-loading effect by forming a metal layer with a plurality of unit metal layer and connecting them with a bridge. A first metal layer(10) is arranged under a first insulating layer(51), and a second insulating layer(52) is arranged under the first metal layer. A second metal layer(20) is arranged under the second insulation layer, and a third insulating layer(53) is arranged under the second metal layer. A third metal layer is arranged under a third insulating layer while being connected with a first metal layer.
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