摘要 |
A gripping device for inspecting a wafer visually is provided to grip the wafer while matching the center of the wafer by moving a plurality of movable members to the same direction and distance by one pneumatic actuator. A rotating member(30) is rotatably coupled to a support member(10). A plurality of moveable members(40) are coupled to the support member to move in a straight line and are arranged around the central axis of the rotating member. A plurality of gripping claws(50) are coupled in the movable member and grip the edge of the wafer. A plurality of connecting units(60) are equipped to correspond to each moveable member and are connected to each movable member and the rotating member to move the plurality of movable members to the same direction in the straight line by interaction with the rotation of the rotating member. A pneumatic actuator(70) rotates and drives the rotating member.
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