发明名称 GRIPPING DEVICE FOR INSPECTING A WAFER VISUALLY
摘要 A gripping device for inspecting a wafer visually is provided to grip the wafer while matching the center of the wafer by moving a plurality of movable members to the same direction and distance by one pneumatic actuator. A rotating member(30) is rotatably coupled to a support member(10). A plurality of moveable members(40) are coupled to the support member to move in a straight line and are arranged around the central axis of the rotating member. A plurality of gripping claws(50) are coupled in the movable member and grip the edge of the wafer. A plurality of connecting units(60) are equipped to correspond to each moveable member and are connected to each movable member and the rotating member to move the plurality of movable members to the same direction in the straight line by interaction with the rotation of the rotating member. A pneumatic actuator(70) rotates and drives the rotating member.
申请公布号 KR20090070570(A) 申请公布日期 2009.07.01
申请号 KR20070138618 申请日期 2007.12.27
申请人 SILTRON INC. 发明人 PARK, SE HWAN
分类号 H01L21/683;H01L21/66 主分类号 H01L21/683
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