发明名称 METHOD FOR FORMING METAL THIN FILM, AND METAL THIN FILM
摘要 A metal thin film-forming method which comprises the step of firing metal nanoparticles each comprising a particle consisting of at least one metal selected from Ag, Au, Ni, Pd, Rh, Ru, and Pt or an alloy comprising at least two of these metals and an organic substance adhered to the periphery thereof as a dispersant, under a gas atmosphere containing water and/or an organic acid to thus form a metal thin film. This metal thin film possesses a low resistance value.
申请公布号 KR100905214(B1) 申请公布日期 2009.07.01
申请号 KR20077015281 申请日期 2007.07.03
申请人 发明人
分类号 C23C24/08;B22F9/12;H01B5/14;H01B13/00 主分类号 C23C24/08
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