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发明名称
具有前驱物预混合之喷头设计
摘要
本发明提供一种可以用于沈积制程中的方法和装置,该些沈积制程系例如金属氮化物膜的氢化物气相磊晶(hydride vapor phase epitaxial, HVPE)沈积。第一组通路可引入含金属前驱物气体。第二组通路可提供含氮前驱物气体。分散所述第一和第二组通路以分开所述含金属前驱物气体和所述含氮前驱物气体直到它们到达基材。惰性气体还可流经所述通道以帮助保持间距和限制所述通路处或其附近的反应,从而防止所述通路上的不希望的沈积。
申请公布号
TW200927984
申请公布日期
2009.07.01
申请号
TW097141027
申请日期
2008.10.24
申请人
应用材料股份有限公司
发明人
伯洛斯布莱恩H;克瑞劳可欧嘉;美林克尤瑞;葛瑞松嘉寇伯;奈哈万山迪普;史帝文斯罗纳德;阿佳亚史苏美德
分类号
C23C16/455(2006.01);C23C16/448(2006.01);H01L21/365(2006.01)
主分类号
C23C16/455(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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