发明名称 |
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
摘要 |
A plasma system is disclosed. The plasma system includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The plasma system also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.
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申请公布号 |
US7554053(B2) |
申请公布日期 |
2009.06.30 |
申请号 |
US20050317874 |
申请日期 |
2005.12.23 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
KAMAREHI MOHAMMAD;WANG ING-YANN ALBERT |
分类号 |
C23C16/00;H05B6/76;H05H1/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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