发明名称 Forming a semiconductor device feature using acquired parameters
摘要 In one embodiment, a controller coupled to a focused ion beam tool can execute instructions to acquire parameters for a feature of a semiconductor device, determine a data array using the parameters, and cause the focused ion beam tool to perform tool iterations to form the feature on the semiconductor device using the data array. Other embodiments are described and claimed.
申请公布号 US7554108(B2) 申请公布日期 2009.06.30
申请号 US20060416567 申请日期 2006.05.03
申请人 INTEL CORPORATION 发明人 SCOTT DANE L.;VASQUEZ KEVIN J.
分类号 H01J37/301;H01L21/00 主分类号 H01J37/301
代理机构 代理人
主权项
地址