| 摘要 |
A drive apparatus drives a wafer table in Y-axis direction according to a measured value of an encoder (64) which measures position information on a wafer table (WTB) in the Y-axis direction and known correction information based on the position information on the wafer table (WTB) in a non-measurement direction(such as Z, Thetaz, and Thetax direction) measured by interferometers (16, 43A, 43B) upon measurement. That is, the mobile body is driven in the Y-axis direction according to the encoder measurement value corrected by the correction information for correcting the encoder measurement error attributed to a relative displacement between a head and a scale in the non-measurement direction. Accordingly, it is possible to accurately drive the wafer table (mobile body) in a desired direction while measuring the position by the encoder without being affected by a relative movement other than the movement direction to be measured between the head and the scale (measurement direction). |
