发明名称 |
Optical component of quartz glass, method for producing the optical component, and use thereof |
摘要 |
Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1x1016 molecules/cm3 to 5.0x1016 molecules/cm3, and with a content of SiH groups of less than 5x1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.
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申请公布号 |
US7552601(B2) |
申请公布日期 |
2009.06.30 |
申请号 |
US20050093318 |
申请日期 |
2005.03.30 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
KUEHN BODO;THOMAS STEPHAN;KAISER STEFFEN |
分类号 |
C03B15/00;C03B19/14;C03B20/00;C03B37/00;C03C3/06;C03C4/00;G02B1/00;G03F7/20;H01L21/027 |
主分类号 |
C03B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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