| 发明名称 |
Polishing article with integrated window stripe |
| 摘要 |
A method is described. The method includes contacting a non-solid material to a non-linear edge of a sheet of polishing material, and causing the non-solid material to solidify to form a window that contacts the non-linear edge of the polishing material.
|
| 申请公布号 |
US7553214(B2) |
申请公布日期 |
2009.06.30 |
| 申请号 |
US20070707548 |
申请日期 |
2007.02.15 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
MENK GREGORY E.;MCREYNOLDS PETER;RONDUM ERIK S.;IYER ANAND N.;PRABHU GOPALAKRISHNA B.;LEUNG GARLEN C. |
| 分类号 |
B24B49/12;B24B37/20;B24D11/00;H01L21/304 |
主分类号 |
B24B49/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
