发明名称 Chip embedded package structure and fabrication method thereof
摘要 A chip embedded package structure and a fabrication method thereof are proposed. An adhesive layer is formed on a bottom surface of a carrier board having at least one cavity to seal one end of the cavity. At least one semiconductor chip is mounted via its non-active surface on the adhesive layer and received in the cavity. A protection layer is formed on an active surface of the semiconductor chip. A conductive layer is formed on a top surface of the carrier board, the protection layer and the cavity. A patterned resist layer is applied on the conductive layer and is formed with an electroplating opening at a position corresponding to a gap between the cavity and the semiconductor chip. An electroplating process is performed to form a metal layer in the electroplating opening, such that the semiconductor chip can be effectively fixed in the cavity by the metal layer.
申请公布号 US7554131(B2) 申请公布日期 2009.06.30
申请号 US20060391058 申请日期 2006.03.28
申请人 PHOENIX PRECISION TECHNOLOGY CORPORATION 发明人 ZENG ZHAO-CHONG
分类号 H01L21/50;H01L21/44;H01L21/48 主分类号 H01L21/50
代理机构 代理人
主权项
地址