发明名称 |
Chip embedded package structure and fabrication method thereof |
摘要 |
A chip embedded package structure and a fabrication method thereof are proposed. An adhesive layer is formed on a bottom surface of a carrier board having at least one cavity to seal one end of the cavity. At least one semiconductor chip is mounted via its non-active surface on the adhesive layer and received in the cavity. A protection layer is formed on an active surface of the semiconductor chip. A conductive layer is formed on a top surface of the carrier board, the protection layer and the cavity. A patterned resist layer is applied on the conductive layer and is formed with an electroplating opening at a position corresponding to a gap between the cavity and the semiconductor chip. An electroplating process is performed to form a metal layer in the electroplating opening, such that the semiconductor chip can be effectively fixed in the cavity by the metal layer.
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申请公布号 |
US7554131(B2) |
申请公布日期 |
2009.06.30 |
申请号 |
US20060391058 |
申请日期 |
2006.03.28 |
申请人 |
PHOENIX PRECISION TECHNOLOGY CORPORATION |
发明人 |
ZENG ZHAO-CHONG |
分类号 |
H01L21/50;H01L21/44;H01L21/48 |
主分类号 |
H01L21/50 |
代理机构 |
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代理人 |
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地址 |
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