发明名称 Semiconductor device and manufacturing method thereof
摘要 An island-like interlayer insulating film is formed selectively in a region where a source interconnection and a gate interconnection intersect. For example, by use of ink jet method, a solution containing an insulating material is dropped on a region where the gate interconnection and the source interconnection intersect or a region where a holding capacitor is formed, that enable to reduce a photolithography process and to reduce the number of masks that are used in a TFT.
申请公布号 US7554117(B2) 申请公布日期 2009.06.30
申请号 US20040809118 申请日期 2004.03.25
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 NAKAMURA OSAMU
分类号 H01L29/04;H01L21/336;H01L21/768;H01L21/77;H01L27/12;H01L31/036 主分类号 H01L29/04
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