发明名称 Thin film transistor, flat panel display having the same and a method of fabricating each
摘要 A TFT having a dual buffer structure, a method of fabricating the same, and a flat panel display having the TFT, and a method of fabricating the same are provided. The TFT includes a first buffer layer formed of an amorphous silicon layer on a substrate, a second buffer layer formed on the first buffer layer. The TFT also includes a semiconductor layer formed on the second buffer layer and a gate electrode formed on the semiconductor layer. The dual buffer structure provides better barrier to impurities diffusing from the substrate, and also acts as a black matrix to reduce unwanted reflections and is a source of hydrogen to passivate other layers.
申请公布号 US7554118(B2) 申请公布日期 2009.06.30
申请号 US20050124124 申请日期 2005.05.09
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 KIM CHANG-SOO;KANG TAE-WOOK;JEONG CHANG-YONG;OH JAE-YOUNG;PARK SANG-IL;SEO SEONG-MOH
分类号 G02F1/1368;H01L29/04;G02F1/136;G09F9/30;H01L21/00;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L27/32;H01L29/10;H01L29/15;H01L29/745;H01L29/76;H01L29/786;H01L31/036;H01L31/0376;H01L31/20;H01L51/52 主分类号 G02F1/1368
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