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发明名称
Flash memory device including multylayer tunnel insulator and method of fabricating the same
摘要
申请公布号
KR100905276(B1)
申请公布日期
2009.06.30
申请号
KR20070002152
申请日期
2007.01.08
申请人
发明人
分类号
H01L27/115;H01L21/8247
主分类号
H01L27/115
代理机构
代理人
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