发明名称 |
METHOD OF FABRICATING SCHOTTKY BARRIER TRANSISTOR |
摘要 |
A method for manufacturing a schottky barrier transistor is provided to improve a scaling-down effect due to an alignment error by performing a mask process twice in a perpendicular direction. A pair of cavities and a channel forming part are formed on a substrate(200). The cavities are used for forming a source forming part and a drain forming part. A channel forming part having a shape of fin is formed between the cavities. The cavities are filled with a metal. A channel(210), a source(221), and a drain are formed by patterning the channel forming part, the source forming part, and the drain forming part in a perpendicular direction to the longitudinal direction of the channel forming part. A gate oxide layer for covering the source, the drain, and the channel forming part and a gate metal layer are sequentially formed on the substrate. A gate electrode is formed on the channel layer by patterning the gate metal layer. A schottky barrier is formed by processing thermally the substrate.
|
申请公布号 |
KR20090068687(A) |
申请公布日期 |
2009.06.29 |
申请号 |
KR20070136399 |
申请日期 |
2007.12.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK, SUNG HO;NOH, JIN SEO;JEON JOONG S.;BAE, EUN JU |
分类号 |
H01L21/336;H01L21/338 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|