发明名称 METHOD FOR PRODUCING A SEMICONDUCTOR WAFER WITH A POLISHED EDGE
摘要 <p>The invention relates to a method for producing a semiconductor wafer with a polished edge, said method comprising the following steps:a polishing of at least one side of the semiconductor wafer,and a polishing of the edge of the polished semiconductor wafer,wherein the edge is polished in the presence of a polishing agent by means of a polishing cloth containing fixed abrasive.</p>
申请公布号 SG152978(A1) 申请公布日期 2009.06.29
申请号 SG20080072340 申请日期 2008.09.26
申请人 SILTRONIC AG 发明人 ROETTGER KLAUS;AIGNER WERNER;TABATA MAKOTO
分类号 B24B37/04 主分类号 B24B37/04
代理机构 代理人
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