APPARATUS FOR SUPPLYING SOURCE GAS

摘要

An apparatus for supplying source gas is provided to prevent waste of a source material with high price by accurately notifying that the source material is reduced to specific level. An apparatus for supplying source gas is a device providing a source material(120) stored in a source material container(100) into deposition chamber in which a thin film is deposited by the chemical gasity deposition method. The apparatus for supplying source gas comprises a notification device(150). The notification device informs when the standard amount of source material remains in the source material container.