METHOD FOR CONTROLLING ELECTRIC POTENTIAL, UNIT FOR CONTROLLING ELECTRIC POTENTIAL AND APPARATUS FOR PROCESSING SUBSTRATES USING THE SAME,申请号KR20070088050-传众专利搜索

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发明名称	METHOD FOR CONTROLLING ELECTRIC POTENTIAL, UNIT FOR CONTROLLING ELECTRIC POTENTIAL AND APPARATUS FOR PROCESSING SUBSTRATES USING THE SAME
摘要
申请公布号	KR100905257(B1)	申请公布日期	2009.06.29
申请号	KR20070088050	申请日期	2007.08.31
申请人		发明人
分类号	H01L23/60;H01L21/00;H01L21/02;H01L21/68	主分类号	H01L23/60
代理机构		代理人
主权项
地址

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