METHOD FOR FABRICATING CONTACT PLUG OF SEMICONDUCTOR DEVICE,申请号KR20020088131-传众专利搜索

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发明名称	METHOD FOR FABRICATING CONTACT PLUG OF SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100905187(B1)	申请公布日期	2009.06.29
申请号	KR20020088131	申请日期	2002.12.31
申请人		发明人
分类号	H01L21/283;H01L21/28;(IPC1-7):H01L21/283	主分类号	H01L21/283
代理机构		代理人
主权项
地址

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