发明名称 SAMPLING CARRIER
摘要 A sampling carrier is provided to improve efficiency of a purge operation by forming the mixed flow of the purge gas inside the container by using a blowing pipe. A sampling carrier(20) includes a container(21), an inflow port(22), an exhaust port(23), a pressure gauge(24) and a blowing pipe(25). The gas is inputted to the container through the inflow port. The gas inside the container is exhausted to the outside through the exhaust port. The pressure gauge displays the internal pressure of the container. The blowing pipe induces the inputted gas to the inside of the container and diffuses and sprays the gas.
申请公布号 KR100904999(B1) 申请公布日期 2009.06.26
申请号 KR20080135860 申请日期 2008.12.29
申请人 SEOUL INDUSTRIAL TECHNICAL CORP. 发明人 JANG, HEE RYONG
分类号 H01L21/00 主分类号 H01L21/00
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