| 摘要 |
This invention provides an apparatus for producing a single crystal and a method for producing a single crystal. The apparatus is provided with at least a chamber dividable into a plurality of parts, for producing a single crystal by a Czochralski method. At least one of the plurality of the divided chambers has a flow path for a circulating cooling medium in which the circulating cooling medium for cooling the chamber is circulated, and means for respectively measuring inlet and outlet temperatures in the flow path for the circulating cooling medium and the flow rate of the circulating cooling medium. In the apparatus for producing the single crystal and method for producing the single crystal using this apparatus, a calculating means for calculating the quantity heat removed and/or the proportion of the quantity of heat removed from the chamber, base on the measured values of the inlet temperature and outlet temperature and flow rate of the circulating cooling medium, is provided. Further, pull-up speed control means for controlling the pull-up speed of the single crystal based on the calculated quantity of heat removed and/or the proportion of heat removed is also provided. The above apparatus for producing a single crystal and method for producing a single crystal can produce a single crystal while easily stabilizing the quality of the crystal. |
