| 摘要 |
PROBLEM TO BE SOLVED: To provide a field emission type electron source device realizing alignment by fine control after mechanical positioning without any elaborate course control mechanism. SOLUTION: The field emission type electron source device includes a semiconductor substrate with an electron source array formed and a trimming electrode disposed above the electron source array and having a plurality of through-holes. The number of arrays of the through-holes is larger than that of electron source cells of the electron source array and a pitch of arrays of the electron source cells of the electron source array is equal to that of the through-holes. COPYRIGHT: (C)2009,JPO&INPIT
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