| 摘要 |
PROBLEM TO BE SOLVED: To provide a position instruction method, a position instruction program and a position instruction device, allowing supply of a substrate to a position wherein a substrate holder can certainly hold a substrate, in position instruction to a robot installing the discoid substrate to the substrate holder of a device. SOLUTION: This position instruction method to the robot installing the substrate to the substrate holder supporting the substrate by jaws supporting the substrate in the device having a plurality of the substrate holders comprises: a first position acquisition procedure for making the robot carry the substrate to a supply position to a keyboard, and acquiring a center position of the substrate as first position information; a second position acquisition procedure for acquiring a center position of the substrate after the installation to the substrate holder from the supply position as second position information; a difference calculation procedure for obtaining a difference between the first and second position information; a representative difference calculation means for obtaining a representative difference representing the difference from a plurality of the differences by a prescribed calculation method; and an instruction procedure for obtaining an instruction position based on the representative difference, and instructing the robot. COPYRIGHT: (C)2009,JPO&INPIT
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