发明名称 |
JET PLASMA GUN AND PLASMA DEVICE USING THE SAME |
摘要 |
A jet plasma gun and a plasma device using the same are provided. The jet plasma gun is for jetting plasma to process a surface of a substrate. The jet plasma gun includes a plasma producer, a plasma nozzle and a barrier. The plasma producer is for providing plasma. The plasma nozzle disposed between the substrate and plasma producer has a first opening and a second opening. The first opening faces plasma producer, and the second opening faces the substrate. The barrier being an insulator is disposed between the plasma nozzle and the substrate and has a through hole corresponding to the second opening. The plasma passes through the plasma nozzle and the through hole to reach the substrate.
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申请公布号 |
US2009159212(A1) |
申请公布日期 |
2009.06.25 |
申请号 |
US20080136838 |
申请日期 |
2008.06.11 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
CHANG CHIA-CHIANG;TSAI CHEN-DER;HSU WEN-TUNG;CHEN CHIH-WEI;WU CHIN-JYI |
分类号 |
C23F1/02;C23C14/34;C23C16/44 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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