发明名称 |
DIAPHRAGM PRESSURE MEASURING CELL ARRANGEMENT |
摘要 |
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.
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申请公布号 |
US2009158853(A1) |
申请公布日期 |
2009.06.25 |
申请号 |
US20080327962 |
申请日期 |
2008.12.04 |
申请人 |
BERNER WALTER CHRISTIAN;ANTILA JARKKO;DUPLAIN GAETAN;BJORKMAN PER;MANSELIN TOVE;UNTERMARZONER OSKAR |
发明人 |
BERNER WALTER CHRISTIAN;ANTILA JARKKO;DUPLAIN GAETAN;BJORKMAN PER;MANSELIN TOVE;UNTERMARZONER OSKAR |
分类号 |
G01L9/12;G01B9/02 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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