发明名称 WAFER STACK, INTEGRATED OPTICAL DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>An integrated optical device (10) and a method for fabricating an integrated optical device (10) by creating a wafer stack (8) by stacking at least a top wafer (2) carrying as functional elements a plurality of lenses (9a, 9b) on at least one further wafer (4) comprising further functional elements (9c), and separating the wafer stack (8) into a plurality of integrated optical devices (10), wherein corresponding functional elements of the top and further wafer (2, 4) are aligned with each other and define a plurality of main optical axes (14), providing a sunshade plate as part of an integrated optical device (10), comprising the steps of providing a sunshade plate (1) comprising a plurality of through holes (6), the through holes (6) being arranged to correspond to the arrangement of the functional elements on the top wafer (2); stacking the sunshade plate (1) on the top wafer (2), with the through holes (6) being aligned with said main optical axes (14).</p>
申请公布号 WO2009076788(A1) 申请公布日期 2009.06.25
申请号 WO2008CH00532 申请日期 2008.12.16
申请人 HEPTAGON OY;ROSSI, MARKUS;RUDMANN, HARTMUT 发明人 ROSSI, MARKUS;RUDMANN, HARTMUT
分类号 H01L27/146;H01L31/0216 主分类号 H01L27/146
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