摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for suppressing a cost of manufacturing by using a quartz chip containing quartz seeds for manufacturing a quartz device. <P>SOLUTION: Artificial quartz satisfying all of the following conditions is used. The quartz is grown by using a quartz seed 20 prepared by cutting out from artificial quartz having not more than 30 etch channels/cm<SP>2</SP>, heat treating the cut piece at a temperature lower than the α-β transition temperature of the quartz and eliminating a processed layer produced upon cutting out the quartz seed 20. The quartz is grown by using quartz dust with suppressed contents of iron and sodium to not more than 3 ppm and 2 ppm, respectively, as a source material. The density of fine minerals, called as a seed veil, is 0/cm<SP>2</SP>for a seed veil having a major diameter of 30 μm or more, and not more than 5/cm<SP>2</SP>for a seed veil having a major diameter of from 10 μm to less than 30 μm, on the interface between the crystal and the seed 20. <P>COPYRIGHT: (C)2009,JPO&INPIT |