发明名称 QUARTZ DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for suppressing a cost of manufacturing by using a quartz chip containing quartz seeds for manufacturing a quartz device. <P>SOLUTION: Artificial quartz satisfying all of the following conditions is used. The quartz is grown by using a quartz seed 20 prepared by cutting out from artificial quartz having not more than 30 etch channels/cm<SP>2</SP>, heat treating the cut piece at a temperature lower than the &alpha;-&beta; transition temperature of the quartz and eliminating a processed layer produced upon cutting out the quartz seed 20. The quartz is grown by using quartz dust with suppressed contents of iron and sodium to not more than 3 ppm and 2 ppm, respectively, as a source material. The density of fine minerals, called as a seed veil, is 0/cm<SP>2</SP>for a seed veil having a major diameter of 30 &mu;m or more, and not more than 5/cm<SP>2</SP>for a seed veil having a major diameter of from 10 &mu;m to less than 30 &mu;m, on the interface between the crystal and the seed 20. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009137828(A) 申请公布日期 2009.06.25
申请号 JP20080196800 申请日期 2008.07.30
申请人 NIPPON DEMPA KOGYO CO LTD 发明人 TAKAHASHI JUNJI;KAGAMI TOSHIHIKO;OKAMOTO KENZO;NAKAYAMA MORIKATSU;TAKADA MOTOO
分类号 C30B29/18;C01B33/12;C30B7/10;H01L41/09;H01L41/18;H01L41/22;H01L41/317;H01L41/338;H01L41/39;H03H3/02;H03H9/19 主分类号 C30B29/18
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