| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low-resistance capacitor electrode having high work function and heat resistance. <P>SOLUTION: The capacitor electrode has a first surface and a second surface which are arranged opposite each other. The capacitor electrode contains an oxygen atom and a nitrogen atom. The capacitor electrode has a position A where the oxygen atom exhibits a maximum concentration value, between the first surface and the second surface in a thickness direction, wherein the nitrogen atom is present only in an area closer to the first surface than the position A. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
