| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming apparatus that enables an operator to efficiently replace its sub-carriages and is capable of efficiently measuring the weight of a liquid droplet ejected from its liquid droplet ejection head and of efficiently controlling the temperature in its chamber. SOLUTION: Waiting areas A2 that allow a plurality of carriages disposed on a first to sixth carriage plates P1 to P6 respectively to wait therein are provided on either side of a pattern-forming area A1 of the pattern forming apparatus along the direction of its Y-axis. Therefore, the replacement work of the plurality of sub-carriages each equipped with a liquid droplet ejection head can concurrently be carried out in the waiting areas A2 by moving the first to sixth carriage plates P1 to P6 independently to either of the waiting areas A2, and pattern forming can be carried out while disposing the liquid droplet ejection heads, which generate heat, on a roughly central position of a chamber 2. Further, a weight-measuring unit 54 for measuring the weight of a liquid droplet ejected from each of the liquid droplet ejection heads is provided in each of the waiting areas A2, and therefore the weight of the liquid droplet ejected from each of the liquid droplet ejection heads can concurrently be measured in each of the waiting areas A2. COPYRIGHT: (C)2009,JPO&INPIT |
