发明名称 |
LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AND APPLICATIONS OF ELECTRON SOURCES |
摘要 |
An evaporation apparatus for evaporating a material to be deposited is described. The evaporation apparatus includes at least one evaporation crucible having a body with an area for receiving the material to be deposited at one side; a linear electron source being positioned adjacent to the evaporation crucible for impingement of an electron beam on another side. The linear electron source includes a housing acting as a first electrode, the housing having side walls; slit opening in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source; a second electrode being arranged within the housing and having a first side facing the slit opening; and at least one gas supply for providing a gas into the housing, wherein the first electrode is the anode and the second electrode is the cathode.
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申请公布号 |
US2009161719(A1) |
申请公布日期 |
2009.06.25 |
申请号 |
US20080341791 |
申请日期 |
2008.12.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KLEMM GUENTER;HACKER VOLKER;LOTZ HANS-GEORG |
分类号 |
H01J37/305;B08B6/00;B23K10/00 |
主分类号 |
H01J37/305 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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