| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive switch without necessity of another mounting package. <P>SOLUTION: Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this cavity part, a first electrode part 19 which is supported and suspended in the cavity part in both-end support shape and a second electrode 24 which is opposedly arranged with a fixed spacing at the first electrode part 19 are installed via: a driving part 16 in which a lower part electrode layer 20, a piezoelectric layer 21, and an upper part electrode layer 22 are sequentially formed; and an elastic body part 17 consisting of at least one part of these upper part electrode layer 22, the lower part electrode layer 20, and the piezoelectric layer 21. <P>COPYRIGHT: (C)2009,JPO&INPIT |
