| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite-oxide thin film for an environmental gas sensor formed of heterogeneous oxide nano-crystalline particles. SOLUTION: This nano-crystalline composite-oxide thin film for an environmental gas sensor is a composite-oxide thin film formed of heterogeneous oxide nano-crystalline particles having crystalline phases independent of one another. This capacitance type gas sensor uses the composite-oxide thin film and is used for detecting an environmental harmful gas. For the oxide, two or more kinds of oxides are selected from a group comprising an ABO<SB>3</SB>type perovskite oxide, ZnO, CuO, NiO, SnO<SB>2</SB>, TiO<SB>2</SB>, CoO<SB>2</SB>, In<SB>2</SB>O<SB>3</SB>, WO<SB>3</SB>, MgO, CaO, La<SB>2</SB>O<SB>3</SB>, Nd<SB>2</SB>O<SB>3</SB>, Y<SB>2</SB>O<SB>3</SB>, CeO<SB>2</SB>, PbO, ZrO<SB>2</SB>, Fe<SB>2</SB>O<SB>3</SB>, Bi<SB>2</SB>O<SB>3</SB>, V<SB>2</SB>O<SB>5</SB>, Vo2, Nb<SB>2</SB>O<SB>5</SB>, Co<SB>3</SB>O<SB>4</SB>and Al<SB>2</SB>O<SB>3</SB>. The oxide nano-crystalline particle has a diameter of 1-100 nm. COPYRIGHT: (C)2009,JPO&INPIT
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