| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measuring device capable of easily correcting encoder signal whose amplitude and offset change in each cycle. SOLUTION: A displacement measuring device comprises: an actuator 3 for displacing an object to be measured; an encoder 5 for measuring the position of the object to be measured; a controller 1 for controlling driving of the actuator 3 by outputting a driving command signal 2 to the actuator 3 based on the position of the object to be measured; a storage device 9 for storing the corrected value 10 of a bi-phase encoder signal 6 output from the encoder 5 before correction in each cycle of the encoder signal in calibration mode; and an encoder signal correcting device 7 for correcting the encoder signal 6 before correction by switching the corrected value 10 in every cycle and outputting the corrected encoder signal 11 to the controller 1 in normal mode. COPYRIGHT: (C)2009,JPO&INPIT
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