<p>Drive mass portions (4 to 7) are arranged above a surface of a substrate (2). The drive mass portions (4 to 7) are arranged symmetrically against a central point O. The drive mass portions (4 to 7) are connected to a detection mass portion (15) by using a drive beam (8) while a connection beam (9) is used for connection in the vicinity of support points (4B to 7B) of the drive mass portions (4 to 7). The detection mass portion (15) is fixed to a support portion (3) on the substrate (2) by using detection beams (16, 17). The drive mass portions (4 to 7) adjacent in the circumferential direction are oscillated with the opposite phases by oscillation generation portions (10 to 13). When angular velocities O1, O2 are applied in this state, the detection mass portion (15) is displaced to be oscillated in the thickness direction of the substrate (2) with respect to detection axes A and B as centers. Displacement detection units (18 to 21) detect the displacement of the detection mass portion (15) in the thickness direction of the detection mass portion (15).</p>
