| 摘要 |
PROBLEM TO BE SOLVED: To measure the amount of plane tilt of an optical deflector with high accuracy, regardless the variation in the rotation of a motor which drives the optical deflector. SOLUTION: Scanning light of the optical deflector 1 is introduced to a light-receiving means 5 through a slit 4 which has a pair of triangle open parts 4S1 and 4S2, formed by a pair of mutually parallel edges extending in a subscanning direction and a pair of mutually tilted edges. The scanning speed is measured by every scanning by the two parallel edges, and the position of the scanning light in the subscanning direction is calculated, by using the obtained scanning speed information and the position information in the subscanning direction obtained by the two tilted edges. A high-accuracy measurement of position is performed, by canceling the influence of the unevenness in the turning of the optical deflector 1. COPYRIGHT: (C)2009,JPO&INPIT |
