| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin polarizer array and a wavelength plate array which are composed of micro regions having different optical axis directions and wavelength characteristics and have a high extinction ratio and a low insertion loss, and to provide a polarization analyzer using the thin polarizer array and the wavelength plate array. SOLUTION: An array of micro periodic grooves is formed on a substrate, with the directions changed from one region to another. Subsequently, an alternating multilayer film of a high refractive index material such as Si or Ta<SB>2</SB>O<SB>5</SB>and a low refractive index material such as SiO<SB>2</SB>is formed by bias sputtering. By selecting a condition that each layer maintains a periodic protruded/recessed shape, an array of photonic crystal polarizer is formed. By mounting the array of photonic crystal polarizer in a photodetector array, the polarization analyzer that is small, has no movable part, is composed of a small number of components and permits high-precision measurement can be constituted. COPYRIGHT: (C)2009,JPO&INPIT
|
