Plasma reactor gas distribution plate having a path splitting manifold immersed within a showerhead

摘要

A showerhead of a plasma reactor has an internal plenum comprising a showerhead floor and a plurality of gas injection holes through the floor of the showerhead. A path splitting manifold is immersed inside the plenum and comprises a gas supply inlet, plural gas outlets, and a plurality of channels comprising plural paths of equal lengths between the inlet and respective ones of the plural outlets.