| 摘要 |
A substrate processing apparatus, a substrate processing method, and a storage medium are provided to reduce a frequency of forced stop operations caused by reduction of a processing solution within a processing solution supply unit. A plurality of solution processing units perform solution processing operations on a substrate. A substrate transferring unit transfers the substrate with respect to the solution processing units. A processing solution supply unit(13) supplies the processing solution to the solution processing units. A residual processing solution detection unit detects the residual amount of processing solution within the processing solution supply unit. A control unit stops a substrate transferring operation of the substrate transferring unit when the residual amount of processing solution is lower than the predetermined amount of processing solution.
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