| 摘要 |
<p>Disclosed is an in-vacuum welding treatment apparatus (1) comprising a vacuum chamber (100), a carrier (400) arranged in the vacuum chamber (100) and capable of moving in an X-direction while carrying a work, a carrier drive device arranged outside of the vacuum chamber (100), a welding head (300) arranged in the vacuum chamber and capable of moving in a Y-direction, a welding head drive device (540) arranged outside of the vacuum chamber (100), a Z-direction movable member arranged in the welding head (300) and capable of moving relatively in a Z-direction, a welding roller held in the Z-direction movable member for welding the work, a first roller drive shaft (600) arranged in the vacuum chamber (100) in parallel with the Y-direction, a first roller drive shaft driving device (620) arranged outside of the vacuum chamber (100), and a first conversion device (360) arranged in the welding head (300) for converting the power of the first roller drive shaft (600) into the Z-direction moving power of the Z-direction movable member. Thus, the in-vacuum welding treatment apparatus can make the vacuum chamber smaller than that of the prior art.</p> |
