| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for measuring fluorine gas which enhances the stability of a fluorine gas densitometer, rapidly and correctly respond, even to the changes in the concentration of the fluorine gas, and carries out preparation of a measuring section simply and surely, without introducing standard fluorine gas and xenon fluoride into the measurement site. SOLUTION: In the method for measuring the fluorine gas, which measures the concentration of the fluorine gas in a sample gas by using a light-emission type fluorine gas densitometer, an inert gas is introduced continuously into the fluorine gas densitometer 11, and the sample gas is introduced intermittently into the inert gas, thereby the concentration density of the fluorine gas is measured in the sample gas. COPYRIGHT: (C)2009,JPO&INPIT
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