| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement amount detector of a microstructure accurately meeting various inspections in which a prescribed momentum is given to it in a wafer state. SOLUTION: This displacement amount detector 61 of a microstructure is equipped with a body base part 62, a movable base plate 63 provided so as to be turnable relative to the base part 62, a unit 64 supported on the base plate 63 for holding the wafer W, a contact means for collectively putting a plurality of contacts 65 into contact with a plurality of electrode pads disposed on the wafer W held by the unit 64, a signal input/output circuit 67a, etc. for inputting/outputting signals between the plurality of electrode pads and the contacts 65 put into contact therewith by the contact means, and a detection circuit 67d for detecting the displacement amount of a movable-part electrode based on the signals input/output by the input/output circuit 67a, etc. COPYRIGHT: (C)2009,JPO&INPIT
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