| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring position variation of the rotation center line for accurately measuring the position variation of the rotation center line following the rotation of a specimen. SOLUTION: A tool 3 for measurement having three reflection planes is installed so as to rotate integrally with the specimen 5, and an interference fringe image carrying shape information of the tool 3 for measurement is imaged by an interferometer 1 at a plurality of times in a rotation process of the specimen 5. Based on each imaged interference fringe image, the trajectory of the intersection point of straight lines is determined when the nodal line of each of two reflection planes selected from the three reflection planes is orthogonally projected to a two dimensional coordinates plane. Based on the determined trajectory, the position variation amount of the rotation center line A of the specimen 5 is calculated. COPYRIGHT: (C)2009,JPO&INPIT
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