PHOTOVOLTAIC DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a photovoltaic device with low series resistance which causes no warpage of a semiconductor substrate even if it is made thin and exhibits a high suppression effect of carrier recombination.

SOLUTION: A photovoltaic device comprises a backside electric field layer composed of a silicon hydride film containing a p-type impurity element and oxygen and disposed between the semiconductor substrate and a back electrode, wherein the backside electric field layer includes an epitaxial layer formed on the semiconductor substrate side and a non-orientation microcrystal layer formed on the back electrode side.

COPYRIGHT: (C)2009,JPO&INPIT