| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device of defect inspection for accurately detecting various defects such as various flaws present on an inspection object formed of a sheet-like or plate-like material; and a linear light source device used for it. SOLUTION: By irradiating an inspection object 6 with light emitted from this linear light source device 7, and detecting light passing through the inspection object 6, flaws a, b on the inspection object 6 are inspected. As the linear light source device 7, a device composed by light emitting diode arrangement bodies 3A, 3B each formed by linearly arranging a plurality of light emitting diodes 3 to set optical axes thereof parallel to one another in a plurality of tiers, and making the directions of the optical axes of the light emitting diodes 3 different from one another on the basis of the light emitting diode arrangement bodies 3A, 3B is used. A defect on the inspection object 6 is inspected based on a detection signal obtained by detecting the light having passed through the inspection object 6 by a monitor camera 8. COPYRIGHT: (C)2009,JPO&INPIT
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