| 摘要 |
PROBLEM TO BE SOLVED: To reduce pressure drop in exhaust and to simplify an ozone supply unit. SOLUTION: A filter device 1 includes an upper casing part 2, a filter part 3, a first gas distribution part 4, a bellows part 5, a second gas distribution part 6 and a lower casing part 7. For example, when gas discharged from an ozone chamber is supplied to an inlet 21 of the upper casing part 2 under a gas pressure lower than the internal pressure of the bellows part 5 (for example, when the gas is exhausted in vacuum), the bellows part 5 expands, the filter part 3 blocks up the inlet 21 and the filter part 3 filters the gas supplied to the inlet 21. When the gas discharged from the ozone chamber is supplied to the inlet 21 under a gas pressure equal to or higher than the internal pressure of the bellows part 5 (for example, when the gas is exhausted under atmospheric pressure), the bellows part 5 contracts and a gap is ensured between the upper casing part 2 and the filter part 3. COPYRIGHT: (C)2009,JPO&INPIT
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