发明名称 APPARATUS FOR LASER DIRECT IMAGE PROCESS OF PANEL
摘要 <p>A LDI(Laser Direct Imaging) exposure apparatus is provided to improve panel productivity by performing a simultaneous exposure process for a plurality of panels. A LDI exposure apparatus includes a stage, a scanning unit(30), a transportation unit, an image unit, and a control unit(60). The stage is formed to fix each of panels(10). The scanning unit is installed at an upper part of the stage in order to scan each of the panels. The transportation unit is installed at a lower part of the stage in order to move the stage. The image unit is installed at one side of the scanning unit in order to detect a reference point(13) of the panel. The control unit controls a position of the stage or a position of the scanning position in order to match the position of the reference point detected by the image unit and the position of the stored panel reference point.</p>
申请公布号 KR20090067699(A) 申请公布日期 2009.06.25
申请号 KR20070135448 申请日期 2007.12.21
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 CHOI, SUNG HWAN;SUNG, JUNG KYUNG;KIM, HYUNG HO;KOO, BONG WAN;KIM, JAE YOUN;YANG, DEK GIN
分类号 H01L21/027;H01L21/66 主分类号 H01L21/027
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