METHOD FOR FABRICATING CAPACITOR

摘要

A method for manufacturing a capacitor is provided to enhance stability and reliability of a semiconductor device by preventing a leaning effect of a lower electrode. A sacrificial layer pattern is formed on an upper surface of a substrate(11). The sacrificial layer includes a plurality of opening areas. A lower electrode(17A) is formed in the inside of the opening areas. A magnetic field attraction inducing layer pattern(19A) is formed on an upper area of the lower electrode. The sacrificial layer pattern is removed by applying the magnetic field to a substrate direction on the upper surface of the substrate.